With EPIC’s virtual company tour, Heidelberg Instruments is inviting the photonics community to its European locations in Germany and in Switzerland. At the company’s new headquarter in Heidelberg, the audience will get insights into maskless lithography systems going through production and assembly facilities, before making a stop at the Process and Application Lab (PAL) where the performances of the direct write systems are demonstrated. An overview of grayscale lithography, from design to micro-structured photoresist will be presented. In Zürich, Heidelberg Instruments Nano will introduce Thermal Scanning Probe Lithography (t-SPL), a technology enabling novel nanofabrication methods. The patterning process of the NanoFrazor systems will be revealed. Back to Germany, in Würzburg, Multiphoton Optics, the youngest Heidelberg Instruments family member will introduce its recently launched multi-user tool, the MPO 100, combining both 3D laser lithography and 3D microprinting in one device with unique key features in two-photon polymerization (TPP) technology.
Heidelberg Instruments designs, develops, and manufactures maskless laser lithography and direct write systems for the micro and nanofabrication, serving the global photolithography community in both the direct writing field and in photomask production. Main areas of application include MEMS, micro-optics, advanced packaging (3DIC), IC, flat panel displays (FPD), micro-fluidics, sensors, and other analog and digital electronic components. The Heidelberg Instruments systems are used in research and development, for rapid prototyping, and in the industry environment.